Planotec SEM magnification calibration standard, silicon, unmounted

The Planotec silicon calibration specimen is ideal for magnification calibration or image distortion check in SEM and LM.

Single crystal silicon, 5mm x 5mm. The squares repeat every 10µm (0.01mm). The dividing lines are about 1.9µm wide, formed by electron beam lithography. A broader marking line is written every 500µm (0.5mm) which is useful for light microscopy. Lines are etched, and approximately 300nm deep. Available unmounted or mounted on SEM specimen mounts. A certificate of calibration can be supplied for the Silicon Test Specimen at extra cost.

Many types of samples can be mounted directly onto the Silicon Test Specimen so that an internal calibration is obtained in the image.

Thickness: 675µm
Si crystal orientation: <100>
Wafer type: P-type/boron doped
Resistance: 1-30 Ohm/cm