Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm

The Pelcotec critical dimension magnification standard (CDMS-XY) 2-axis calibration standards provide scale lines in both X and Y axes for ease of 2 axis calibration without stage rotation. They are available as either NIST traceable (using average data measured for each production wafer) or certified against NIST standard (each scale calibrated against a NIST measured standard) with features from 2mm to 100nm for magnification 10-200,000x, ideal for SE, FESEM and FIB.Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm 10µm, 5µm, 2µm, and 1µm, 500nm, 250nm, and 100nm.The CDMS standard may also be mounted on a custom mount of your choice.SEM mount selections Type A-RMade on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5um and a combination of 50nm g...

The Pelcotec critical dimension magnification standard (CDMS-XY) 2-axis calibration standards provide scale lines in both X and Y axes for ease of 2 axis calibration without stage rotation. They are available as either NIST traceable (using average data measured for each production wafer) or certified against NIST standard (each scale calibrated against a NIST measured standard) with features from 2mm to 100nm for magnification 10-200,000x, ideal for SE, FESEM and FIB.

Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm 10µm, 5µm, 2µm, and 1µm, 500nm, 250nm, and 100nm.

The CDMS standard may also be mounted on a custom mount of your choice.

SEM mount selections Type A-R

Made on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5um and a combination of 50nm gold over 20nm chromium for the features from 2µm to 100nm. The Cr and Au/Cr on Si provide excellent contrast both in SE and BSE imaging mode. The features are easier to determine than on etched Si standards. Since the silicon substrate, the chromium and the chromium/gold features are all conductive, there are no charging issues with this calibration standard. Due to its sturdy construction the CDMS standard can be cleaned using a plasma cleaner on low settings.

The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 525µm ±10µm. There is no coating on the Si surface. Each Pelcotec CDMS ISO calibration standard has a unique identification number.

Global certificate of traceability for CDMS

  Pelcotec CDMS-1-ISO
Substrate: Silicon ?
Substrate size: 2.5 x 2.5mm ?
Substrate thickness: 525 ±10µm ?
Unique serial identification number per chip ?
Calibration squares at 2mm, 1mm, 0.5mm, 0.25mm ?
Graticule lines perpendicular to the X axis ruled at 10um, 5um, 2um and 1um pitch ?
High Resolution version only - Additional graticule lines perpendicular to X axis ruled at 500, 250 and 100nm pitch
Feature material: 50nm Cr (2mm - 5µm) ?
Feature material: 20nm Cr/50nm Au (2µm and 1µm) ?
Feature material: 20nm Cr/50nm Au (500, 250 and 100nm)
Traceable at the wafer level to NIST (ISO 17025:2017 Sampling Scope of Accreditation) T versions
Direct certification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) C versions
Available unmounted ?
SEM mounts A-R available ?
Precision better than 0.3% ?
Code Title Style Mount Pack Size Availability Price Updated: 15-07-2024
STP685-01 Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Traceable Unmounted Each 3 weeks Quote only Quote
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STP685-01A Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Traceable Mount A Each 3 weeks Quote only Quote
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STP685-01AFM Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Traceable 12mm AFM Disc Each 3 weeks Quote only Quote
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STP685-01B Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Traceable Mount B Each 3 weeks Quote only Quote
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STP685-01C Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Traceable Mount C Each 3 weeks Quote only Quote
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STP685-01D Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Traceable Mount D Each 3 weeks Quote only Quote
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STP685-01E Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Traceable Mount E Each 3 weeks Quote only Quote
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STP685-01F Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Traceable Mount F Each 3 weeks Quote only Quote
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STP685-01K Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Traceable Mount K Each 3 weeks Quote only Quote
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STP685-01L Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Traceable Mount L Each 3 weeks Quote only Quote
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STP685-01M Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Traceable Mount M Each 3 weeks Quote only Quote
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STP685-01O Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Traceable Mount O Each 3 weeks Quote only Quote
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STP685-01P Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Traceable Mount P Each 3 weeks Quote only Quote
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STP685-01Q Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Traceable Mount Q Each 3 weeks Quote only Quote
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STP685-01R Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Traceable Mount R Each 3 weeks Quote only Quote
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STP685-01S Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Traceable None Each 3 weeks Quote only Quote
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STP690-01 Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Certified Unmounted Each 3 weeks Quote only Quote
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STP690-01A Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Certified Mount A Each 3 weeks Quote only Quote
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STP690-01AFM Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Certified 12mm AFM Disc Each 3 weeks Quote only Quote
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STP690-01B Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Certified Mount B Each 3 weeks Quote only Quote
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STP690-01C Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Certified Mount C Each 3 weeks Quote only Quote
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STP690-01D Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Certified Mount D Each 3 weeks Quote only Quote
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STP690-01E Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Certified Mount E Each 3 weeks Quote only Quote
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STP690-01F Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Certified Mount F Each 3 weeks Quote only Quote
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STP690-01K Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Certified Mount K Each 3 weeks Quote only Quote
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STP690-01L Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Certified Mount L Each 3 weeks Quote only Quote
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STP690-01M Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Certified Mount M Each 3 weeks Quote only Quote
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STP690-01O Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Certified Mount O Each 3 weeks Quote only Quote
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STP690-01P Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Certified Mount P Each 3 weeks Quote only Quote
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STP690-01Q Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Certified Mount Q Each 3 weeks Quote only Quote
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STP690-01R Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Certified Mount R Each 3 weeks Quote only Quote
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STP690-01S Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm Certified None Each 3 weeks Quote only Quote
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