AFM reference standard, 292nm high resolution on 12mm steel disk

Precision holographic grating standard with high contrast and excellent edge definition. 

Period: 292nm pitch nominal, one dimensional array. Accuracy is ±1%. Calibration certificate will give the actual pitch of the standard.
Surface structure: Titanium lines on Silicon, 4 x 3mm dimensions. Line height (about 30nm) and line width (130nm) are not calibrated.
Usability: The calibrated pattern covers the entire chip. There is sufficient usable area to make tens of thousands of measurements without reusing any areas contaminated or altered by previous scans.
AFM: Use in contact, tapping and other modes with image sizes from 500nm to 20um. Mounted on a 12mm steel AFM disk.
SEM, Auger, FIB: Can be used for a wide range of accelerating voltage (<1kV-30kV) and calibrates images from 5kX to 200kX. Can be supplied unmounted or mounted on an SEM stub of your choice.
Certification: There is a version with a non-traceable manufacturer's certificate stating average pitch, based on batch measurements; See Sample Certificate, Non-Traceable

There is also the traceable, certified version measured in comparison with a standard calibrated at PTB (Physiklisch-Technischen Bundesanstalt in Braunschweig, Germany, is the German counterpart of NIST). The standard is NIST traceable by virtue of the mutual recognition agreement by NIST and PTB. 

SEM mount selections Type A-R: Technical Data