Pelcotec CDMS calibration standards, 2mm - 1µm

The Pelcotec critical dimension magnification standard (CDMS) calibration standards are available as either NIST traceable or certified against NIST standard with features from 2mm to 1um for magnification 10-20,000x, ideal for desktop SEM.Feature sizes: 2mm, 1mm, 0.5mm, 10?m, 5?m, 2?m, and 1?mThe CDMS standard may also be mounted on a custom mount of your choice.SEM mount selections Type A-RMade on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5um and a combination of 50nm gold over 20nm chromium for the features from 2um to 100nm. The Cr and Au/Cr on Si provide excellent contrast both in SE and BSE imaging mode. The features are easier to determine than on etched Si standards. Since the silicon substrate, the chromium and the chromium/gold...

The Pelcotec critical dimension magnification standard (CDMS) calibration standards are available as either NIST traceable or certified against NIST standard with features from 2mm to 1um for magnification 10-20,000x, ideal for desktop SEM.

Feature sizes: 2mm, 1mm, 0.5mm, 10?m, 5?m, 2?m, and 1?m

The CDMS standard may also be mounted on a custom mount of your choice.

SEM mount selections Type A-R

Made on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5um and a combination of 50nm gold over 20nm chromium for the features from 2um to 100nm. The Cr and Au/Cr on Si provide excellent contrast both in SE and BSE imaging mode. The features are easier to determine than on etched Si standards. Since the silicon substrate, the chromium and the chromium/gold features are all conductive, there are no charging issues with this calibration standard. Due to its sturdy construction the CDMS standard can be cleaned using a plasma cleaner on low settings.

The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 525?m ?10?m. There is no coating on the Si surface. Each Pelcotec CDMS ISO calibration standard has a unique identification number.

Global certificate of traceability for CDMS

  Pelcotec CDMS-1-ISO
Substrate: Silicon ?
Substrate size: 2.5 x 2.5mm ?
Substrate thickness: 525 ?10?m ?
Unique serial identification number per chip ?
Calibration squares at 2mm, 1mm, 0.5mm, 0.25mm ?
Graticule lines perpendicular to the X axis ruled at 10um, 5um, 2um and 1um pitch ?
High Resolution version only - Additional graticule lines perpendicular to X axis ruled at 500, 250 and 100nm pitch ?
Feature material: 50nm Cr (2mm - 5?m) ?
Feature material: 20nm Cr/50nm Au (2?m and 1?m) ?
Feature material: 20nm Cr/50nm Au (500, 250 and 100nm) ?
Traceable at the wafer level to NIST (ISO 17025:2017 Sampling Scope of Accreditation) T versions
Direct certification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) C versions
Available unmounted ?
SEM mounts A-R available ?
Precision better than 0.3% ?
Code Title Style Mount Pack Size Availability Price Updated: 23-07-2024
S019 Pelcotec CDMS calibration standards, 2mm - 1µm Traceable Unmounted Each 3 weeks $146.00 AUD
STP682-1A Pelcotec CDMS calibration standards, 2mm - 1µm Traceable Mount A Each 3 weeks $175.00 AUD
STP682-1AFM Pelcotec CDMS calibration standards, 2mm - 1µm Traceable 12mm AFM Disc Each 3 weeks $175.00 AUD
STP682-1B Pelcotec CDMS calibration standards, 2mm - 1µm Traceable Mount B Each 3 weeks $175.00 AUD
STP682-1C Pelcotec CDMS calibration standards, 2mm - 1µm Traceable Mount C Each 3 weeks $175.00 AUD
STP682-1D Pelcotec CDMS calibration standards, 2mm - 1µm Traceable Mount D Each 3 weeks $175.00 AUD
STP682-1E Pelcotec CDMS calibration standards, 2mm - 1µm Traceable Mount E Each 3 weeks $175.00 AUD
STP682-1F Pelcotec CDMS calibration standards, 2mm - 1µm Traceable Mount F Each 3 weeks $175.00 AUD
STP682-1K Pelcotec CDMS calibration standards, 2mm - 1µm Traceable Mount K Each 3 weeks $175.00 AUD
STP682-1L Pelcotec CDMS calibration standards, 2mm - 1µm Traceable Mount L Each 3 weeks $175.00 AUD
STP682-1M Pelcotec CDMS calibration standards, 2mm - 1µm Traceable Mount M Each 3 weeks $175.00 AUD
STP682-1O Pelcotec CDMS calibration standards, 2mm - 1µm Traceable Mount O Each 3 weeks $175.00 AUD
STP682-1P Pelcotec CDMS calibration standards, 2mm - 1µm Traceable Mount P Each 3 weeks $175.00 AUD
STP682-1Q Pelcotec CDMS calibration standards, 2mm - 1µm Traceable Mount Q Each 3 weeks $175.00 AUD
STP682-1R Pelcotec CDMS calibration standards, 2mm - 1µm Traceable Mount R Each 3 weeks $175.00 AUD
STP682-1S Pelcotec CDMS calibration standards, 2mm - 1µm Traceable None Each 3 weeks $327.00 AUD
STP686-1 Pelcotec CDMS calibration standards, 2mm - 1µm Certified Unmounted Each 3 weeks $987.00 AUD
STP686-1A Pelcotec CDMS calibration standards, 2mm - 1µm Certified Mount A Each 3 weeks $1,001.00 AUD
STP686-1AFM Pelcotec CDMS calibration standards, 2mm - 1µm Certified 12mm AFM Disc Each 3 weeks $1,001.00 AUD
STP686-1B Pelcotec CDMS calibration standards, 2mm - 1µm Certified Mount B Each 3 weeks $1,001.00 AUD
STP686-1C Pelcotec CDMS calibration standards, 2mm - 1µm Certified Mount C Each 3 weeks $1,001.00 AUD
STP686-1D Pelcotec CDMS calibration standards, 2mm - 1µm Certified Mount D Each 3 weeks $1,001.00 AUD
STP686-1E Pelcotec CDMS calibration standards, 2mm - 1µm Certified Mount E Each 3 weeks $1,001.00 AUD
STP686-1F Pelcotec CDMS calibration standards, 2mm - 1µm Certified Mount F Each 3 weeks $1,001.00 AUD
STP686-1K Pelcotec CDMS calibration standards, 2mm - 1µm Certified Mount K Each 3 weeks $1,001.00 AUD
STP686-1L Pelcotec CDMS calibration standards, 2mm - 1µm Certified Mount L Each 3 weeks $1,001.00 AUD
STP686-1M Pelcotec CDMS calibration standards, 2mm - 1µm Certified Mount M Each 3 weeks $1,001.00 AUD
STP686-1O Pelcotec CDMS calibration standards, 2mm - 1µm Certified Mount O Each 3 weeks $1,001.00 AUD
STP686-1P Pelcotec CDMS calibration standards, 2mm - 1µm Certified Mount P Each 3 weeks $1,001.00 AUD
STP686-1Q Pelcotec CDMS calibration standards, 2mm - 1µm Certified Mount Q Each 3 weeks $1,001.00 AUD
STP686-1R Pelcotec CDMS calibration standards, 2mm - 1µm Certified Mount R Each 3 weeks $1,001.00 AUD
STP686-1S Pelcotec CDMS calibration standards, 2mm - 1µm Certified None Each 3 weeks $1,140.00 AUD