Pelcotec ISO CDMS calibration standards, 2mm-1um, traceable to NIST

Pelcotec CDMS ISO Critical Dimensions and Magnification Standards are easy to use and very useful for quick and precise SEM, FE-SEM, FIB, CD-SEM, LM, and AFM magnification calibration in the X axis.Pelcotec ISO CDMS calibration standards, 2mm-1um, traceable to NIST:Traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) with features from 2mm to 1um for magnification 10x-20,000x, ideal for desktop SEM.Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10?m, 5?m, 2?m, and 1?mThey are available either unmounted or mounted on SEM holders A-R. For AFM applications the Pelcotec CDMS ISO is mounted on a 12mm AFM disc; for LM applications it is mounted on a 25 x 75mm glass slide.The CDMS standard may also be mounted on a custom mount of your choice.

Pelcotec CDMS ISO Critical Dimensions and Magnification Standards are easy to use and very useful for quick and precise SEM, FE-SEM, FIB, CD-SEM, LM, and AFM magnification calibration in the X axis.

Pelcotec ISO CDMS calibration standards, 2mm-1um, traceable to NIST:

Traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) with features from 2mm to 1um for magnification 10x-20,000x, ideal for desktop SEM.

Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10?m, 5?m, 2?m, and 1?m

They are available either unmounted or mounted on SEM holders A-R. For AFM applications the Pelcotec CDMS ISO is mounted on a 12mm AFM disc; for LM applications it is mounted on a 25 x 75mm glass slide.

The CDMS standard may also be mounted on a custom mount of your choice.

SEM mount selections Type A-R

Made on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5um and a combination of 50nm gold over 20nm chromium for the features from 2?m to 100nm. The Cr and Au/Cr on Si provide excellent contrast both in SE and BSE imaging mode. The features are easier to determine than on etched Si standards. Since the silicon substrate, the chromium and the chromium/gold features are all conductive, there are no charging issues with this calibration standard. Due to its sturdy construction the CDMS standard can be cleaned using a plasma cleaner on low settings.

The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 525?m ?10?m. There is no coating on the Si surface. Each Pelcotec CDMS ISO calibration standard has a unique identification number.

Global certificate of traceability for CDMS

  Pelcotec CDMS-1-ISO
Substrate: Silicon ?
Substrate size: 2.5 x 2.5mm ?
Substrate thickness: 525 ?10?m ?
Unique serial identification number per chip ?
Calibration squares at 2mm, 1mm, 0.5mm, 0.25mm ?
Graticule lines perpendicular to the X axis ruled at 10um, 5um, 2um and 1um pitch ?
High Resolution version only - Additional graticule lines perpendicular to X axis ruled at 500, 250 and 100nm pitch ?
Feature material: 50nm Cr (2mm - 5?m) ?
Feature material: 20nm Cr/50nm Au (2?m and 1?m) ?
Feature material: 20nm Cr/50nm Au (500, 250 and 100nm) ?
Traceable at the wafer level to NIST (ISO 17025:2017 Sampling Scope of Accreditation) T versions
Direct certification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) C versions
Available unmounted ?
SEM mounts A-R available ?
Precision better than 0.3% ?
Code Title Mount Pack Size Availability Price Updated: 15-07-2024
STP691-1 Pelcotec ISO CDMS calibration standards, 2mm-1um, traceable to NIST Unmounted Each 3 weeks $287.00 AUD
STP691-1A Pelcotec ISO CDMS calibration standards, 2mm-1um, traceable to NIST Mount A Each 3 weeks $329.00 AUD
STP691-1AFM Pelcotec ISO CDMS calibration standards, 2mm-1um, traceable to NIST Mount AFM disc Each 3 weeks $329.00 AUD
STP691-1B Pelcotec ISO CDMS calibration standards, 2mm-1um, traceable to NIST Mount B Each 3 weeks $329.00 AUD
STP691-1C Pelcotec ISO CDMS calibration standards, 2mm-1um, traceable to NIST Mount C Each 3 weeks $329.00 AUD
STP691-1D Pelcotec ISO CDMS calibration standards, 2mm-1um, traceable to NIST Mount D Each 3 weeks $329.00 AUD
STP691-1E Pelcotec ISO CDMS calibration standards, 2mm-1um, traceable to NIST Mount E Each 3 weeks $329.00 AUD
STP691-1F Pelcotec ISO CDMS calibration standards, 2mm-1um, traceable to NIST Mount F Each 3 weeks $329.00 AUD
STP691-1G Pelcotec ISO CDMS calibration standards, 2mm-1um, traceable to NIST Mount G, custom Each 3 weeks $530.00 AUD
STP691-1K Pelcotec ISO CDMS calibration standards, 2mm-1um, traceable to NIST Mount K Each 3 weeks $329.00 AUD
STP691-1L Pelcotec ISO CDMS calibration standards, 2mm-1um, traceable to NIST Mount L Each 3 weeks $329.00 AUD
STP691-1M Pelcotec ISO CDMS calibration standards, 2mm-1um, traceable to NIST Mount M Each 3 weeks $329.00 AUD
STP691-1O Pelcotec ISO CDMS calibration standards, 2mm-1um, traceable to NIST Mount O Each 3 weeks $329.00 AUD
STP691-1P Pelcotec ISO CDMS calibration standards, 2mm-1um, traceable to NIST Mount P Each 3 weeks $329.00 AUD
STP691-1Q Pelcotec ISO CDMS calibration standards, 2mm-1um, traceable to NIST Mount Q Each 3 weeks $329.00 AUD
STP691-1R Pelcotec ISO CDMS calibration standards, 2mm-1um, traceable to NIST Mount R Each 3 weeks $329.00 AUD
STP691-1S Pelcotec ISO CDMS calibration standards, 2mm-1um, traceable to NIST Mount glass slide Each 3 weeks $329.00 AUD