Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm

The Pelcotec critical dimension magnification standard (CDMS-XY) 2-axis calibration standards provide scale lines in both X and Y axes for ease of 2 axis calibration without stage rotation. They are available as either NIST traceable (using average data measured for each production wafer) or certified against NIST standard (each scale calibrated against a NIST measured standard) with features from 2mm to 1µm for magnification 10-20,000x, ideal for desktop SEM.

Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm,10µm, 5µm, 2µm, and 1µm

Size specifications for SEM mounts A-R. Further technical information on Pelotec CDMS.