PELCO X-CHECKER SEM calibration x-ray wafer references

The PELCO X-Checker Wafer is available for systems set up for silicon wafer handling. The PELCO X-Checker Wafer is available on standard 200mm (8") and 300mm (12") wafers, with eight standards for elemental and spatial calibrations.

References includes:

  • Copper disc to check spectral calibration
  • Manganese 88%, nickel 12% alloy to measure full width at half max (FWHM) detector resolution
  • Nickel 400 mesh TEM grid for imaging calibration
  • PTFE as a fluorine source to measure low energy resolution
  • Carbon to monitor calibration at the low end of the spectrum for thin window detectors
  • Aluminum foil disc
  • Boron nitride to test low energy performance/peak separation
  • 304 stainless steel for checking quantification

Instruction booklet and clamshell wafer storage case included.

Code Title Type Pack Size Availability Price Updated: 15-07-2024
STP602-20 PELCO X-CHECKER SEM calibration x-ray wafer references 200mm Each 3 weeks Quote only Quote
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STP602-21 PELCO X-CHECKER SEM calibration x-ray wafer references 300mm Each 3 weeks Quote only Quote
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