Pelcotec ISO CDMS calibration standards, 2mm - 100nm, certified to NIST

Pelcotec CDMS ISO Critical Dimensions and Magnification Standards are easy to use and very useful for quick and precise SEM, FE-SEM, FIB, CD-SEM, LM, and AFM magnification calibration in the X axis.Pelcotec ISO CDMS calibration standards, 2mm - 100nm, certified to NIST:Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab with features from 2mm to 100nm for magnification 10x-200,000x for SEM, FE-SEM and FIBFeature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, and 100nmThey are available either unmounted or mounted on SEM holders A-R. For AFM applications the Pelcotec CDMS ISO is mounted on a 12mm AFM disc; for LM applications it is mounted on a 25 x 75mm glass slide.The CDMS standard may also be mounted on a custom mount of your choice.

Pelcotec CDMS ISO Critical Dimensions and Magnification Standards are easy to use and very useful for quick and precise SEM, FE-SEM, FIB, CD-SEM, LM, and AFM magnification calibration in the X axis.

Pelcotec ISO CDMS calibration standards, 2mm - 100nm, certified to NIST:

Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab with features from 2mm to 100nm for magnification 10x-200,000x for SEM, FE-SEM and FIB

Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, and 100nm

They are available either unmounted or mounted on SEM holders A-R. For AFM applications the Pelcotec CDMS ISO is mounted on a 12mm AFM disc; for LM applications it is mounted on a 25 x 75mm glass slide.

The CDMS standard may also be mounted on a custom mount of your choice.

SEM mount selections Type A-R

Made on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5µm and a combination of 50nm gold over 20nm chromium for the features from 2µm to 100nm. The Cr and Au/Cr on Si provide excellent contrast both in SE and BSE imaging mode. The features are easier to determine than on etched Si standards. Since the silicon substrate, the chromium and the chromium/gold features are all conductive, there are no charging issues with this calibration standard. Due to its sturdy construction the CDMS standard can be cleaned using a plasma cleaner on low settings.

The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 525µm ±10µm. There is no coating on the Si surface. Each Pelcotec CDMS ISO calibration standard has a unique identification number.

Global certificate of traceability for CDMS

  Pelcotec CDMS-1-ISO
Substrate: Silicon ?
Substrate size: 2.5 x 2.5mm ?
Substrate thickness: 525 ±10µm ?
Unique serial identification number per chip ?
Calibration squares at 2mm, 1mm, 0.5mm, 0.25mm ?
Graticule lines perpendicular to the X axis ruled at 10um, 5um, 2um and 1um pitch ?
High Resolution version only - Additional graticule lines perpendicular to X axis ruled at 500, 250 and 100nm pitch
Feature material: 50nm Cr (2mm - 5µm) ?
Feature material: 20nm Cr/50nm Au (2µm and 1µm) ?
Feature material: 20nm Cr/50nm Au (500, 250 and 100nm)
Traceable at the wafer level to NIST (ISO 17025:2017 Sampling Scope of Accreditation) T versions
Direct certification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) C versions
Available unmounted ?
SEM mounts A-R available ?
Precision better than 0.3% ?
Code Title Mount Pack Size Availability Price Updated: 15-07-2024
STP696-01 Pelcotec ISO CDMS calibration standards, 2mm - 100nm, certified to NIST Unmounted Each 3 weeks Quote only Quote
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STP696-01A Pelcotec ISO CDMS calibration standards, 2mm - 100nm, certified to NIST Mount A Each 3 weeks Quote only Quote
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STP696-01AFM Pelcotec ISO CDMS calibration standards, 2mm - 100nm, certified to NIST Mount AFM disc Each 3 weeks Quote only Quote
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STP696-01B Pelcotec ISO CDMS calibration standards, 2mm - 100nm, certified to NIST Mount B Each 3 weeks Quote only Quote
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STP696-01C Pelcotec ISO CDMS calibration standards, 2mm - 100nm, certified to NIST Mount C Each 3 weeks Quote only Quote
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STP696-01D Pelcotec ISO CDMS calibration standards, 2mm - 100nm, certified to NIST Mount D Each 3 weeks Quote only Quote
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STP696-01E Pelcotec ISO CDMS calibration standards, 2mm - 100nm, certified to NIST Mount E Each 3 weeks Quote only Quote
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STP696-01F Pelcotec ISO CDMS calibration standards, 2mm - 100nm, certified to NIST Mount F Each 3 weeks Quote only Quote
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STP696-01G Pelcotec ISO CDMS calibration standards, 2mm - 100nm, certified to NIST Mount G, custom Each 3 weeks Quote only Quote
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STP696-01K Pelcotec ISO CDMS calibration standards, 2mm - 100nm, certified to NIST Mount K Each 3 weeks Quote only Quote
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STP696-01L Pelcotec ISO CDMS calibration standards, 2mm - 100nm, certified to NIST Mount L Each 3 weeks Quote only Quote
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STP696-01M Pelcotec ISO CDMS calibration standards, 2mm - 100nm, certified to NIST Mount M Each 3 weeks Quote only Quote
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STP696-01O Pelcotec ISO CDMS calibration standards, 2mm - 100nm, certified to NIST Mount O Each 3 weeks Quote only Quote
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STP696-01P Pelcotec ISO CDMS calibration standards, 2mm - 100nm, certified to NIST Mount P Each 3 weeks Quote only Quote
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STP696-01Q Pelcotec ISO CDMS calibration standards, 2mm - 100nm, certified to NIST Mount Q Each 3 weeks Quote only Quote
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STP696-01R Pelcotec ISO CDMS calibration standards, 2mm - 100nm, certified to NIST Mount R Each 3 weeks Quote only Quote
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STP696-01S Pelcotec ISO CDMS calibration standards, 2mm - 100nm, certified to NIST Mount glass slide Each 3 weeks Quote only Quote
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