Pelcotec ISO CDMS calibration standards, 2mm - 100nm, traceable to NIST

Pelcotec ISO CDMS calibration standards, 2mm - 100nm, traceable to NIST:Pelcotec CDMS ISO Critical Dimensions and Magnification Standards are easy to use and very useful for quick and precise SEM, FE-SEM, FIB, CD-SEM, LM, and AFM magnification calibration in the X axis.Traceable at the wafer level to NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) with features from 2mm to 100nm for magnification 10x-200,000x for SEM, FE-SEM and FIBFeature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, and 100nmThey are available either unmounted or mounted on SEM holders A-R. For AFM applications the Pelcotec CDMS ISO is mounted on a 12mm AFM disc; for LM applications it is mounted on a 25 x 75mm glass slide.The CDMS standard may also be mounted on a custom mount of your choice.SEM mount selections Type A-R:

Pelcotec ISO CDMS calibration standards, 2mm - 100nm, traceable to NIST:

Pelcotec CDMS ISO Critical Dimensions and Magnification Standards are easy to use and very useful for quick and precise SEM, FE-SEM, FIB, CD-SEM, LM, and AFM magnification calibration in the X axis.

Traceable at the wafer level to NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) with features from 2mm to 100nm for magnification 10x-200,000x for SEM, FE-SEM and FIB

Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, and 100nm

They are available either unmounted or mounted on SEM holders A-R. For AFM applications the Pelcotec CDMS ISO is mounted on a 12mm AFM disc; for LM applications it is mounted on a 25 x 75mm glass slide.

The CDMS standard may also be mounted on a custom mount of your choice.

SEM mount selections Type A-R: Technical Data

Made on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5µm and a combination of 50nm gold over 20nm chromium for the features from 2µm to 100nm. The Cr and Au/Cr on Si provide excellent contrast both in SE and BSE imaging mode. The features are easier to determine than on etched Si standards. Since the silicon substrate, the chromium and the chromium/gold features are all conductive, there are no charging issues with this calibration standard. Due to its sturdy construction the CDMS standard can be cleaned using a plasma cleaner on low settings.

The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 525µm ±10µm. There is no coating on the Si surface. Each Pelcotec CDMS ISO calibration standard has a unique identification number.

Global certificate of traceability for CDMS

	Pelcotec CDMS-1-ISO
Substrate: Silicon	Yes
Substrate size: 2.5 x 2.5mm	Yes
Substrate thickness: 525 ±10µm	Yes
Unique serial identification number per chip	Yes
Calibration squares at 2mm, 1mm, 0.5mm, 0.25mm	Yes
Graticule lines perpendicular to the X axis ruled at 10um, 5um, 2um and 1um pitch	Yes
High Resolution version only - Additional graticule lines perpendicular to X axis ruled at 500, 250 and 100nm pitch	No
Feature material: 50nm Cr (2mm - 5µm)	Yes
Feature material: 20nm Cr/50nm Au (2µm and 1µm)	Yes
Feature material: 20nm Cr/50nm Au (500, 250 and 100nm)	No
Traceable at the wafer level to NIST (ISO 17025:2017 Sampling Scope of Accreditation)	T versions
Direct certification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation)	C versions
Available unmounted	Yes
SEM mounts A-R available	Yes
Precision better than 0.3%	Yes