Pelcotec ISO CDMS calibration standards, 2mm-1um, traceable to NIST

Pelcotec CDMS ISO Critical Dimensions and Magnification Standards are easy to use and very useful for quick and precise SEM, FE-SEM, FIB, CD-SEM, LM, and AFM magnification calibration in the X axis.

Pelcotec ISO CDMS calibration standards, 2mm-1um, traceable to NIST:

Traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) with features from 2mm to 1?m for magnification 10x-20,000x, ideal for desktop SEM.

Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10?m, 5?m, 2?m, and 1?m

They are available either unmounted or mounted on SEM holders A-R. For AFM applications the Pelcotec CDMS ISO is mounted on a 12mm AFM disc; for LM applications it is mounted on a 25 x 75mm glass slide.

The CDMS standard may also be mounted on a custom mount of your choice.

See SEM mount selections, types A-R

Made on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5?m and a combination of 50nm gold over 20nm chromium for the features from 2?m to 100nm. The Cr and Au/Cr on Si provide excellent contrast both in SE and BSE imaging mode. The features are easier to determine than on etched Si standards. Since the silicon substrate, the chromium and the chromium/gold features are all conductive, there are no charging issues with this calibration standard. Due to its sturdy construction the CDMS standard can be cleaned using a plasma cleaner on low settings.

The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 525?m ?10?m. There is no coating on the Si surface. Each Pelcotec CDMS ISO calibration standard has a unique identification number.