Pelcotec CDMS calibration standards, 2mm - 100nm

The Pelcotec critical dimension magnification standard (CDMS) calibration standards are available as either NIST traceable or certified against NIST standard with features from 2mm to 100nm for magnification 10-200,000x, ideal for SE, FESEM and FIB.Feature sizes: 2mm, 1mm, 0.5mm, 10um, 5um, 2um, and 1um, 500nm, 250nm, and 100nmThe CDMS standard may also be mounted on a custom mount of your choice.SEM mount selections Type A-RMade on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5um and a combination of 50nm gold over 20nm chromium for the features from 2um to 100nm. The Cr and Au/Cr on Si provide excellent contrast both in SE and BSE imaging mode. The features are easier to determine than on etched Si standards. Since the silicon substrate, ...

The Pelcotec critical dimension magnification standard (CDMS) calibration standards are available as either NIST traceable or certified against NIST standard with features from 2mm to 100nm for magnification 10-200,000x, ideal for SE, FESEM and FIB.

Feature sizes: 2mm, 1mm, 0.5mm, 10um, 5um, 2um, and 1um, 500nm, 250nm, and 100nm

The CDMS standard may also be mounted on a custom mount of your choice.

SEM mount selections Type A-R

Made on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5um and a combination of 50nm gold over 20nm chromium for the features from 2um to 100nm. The Cr and Au/Cr on Si provide excellent contrast both in SE and BSE imaging mode. The features are easier to determine than on etched Si standards. Since the silicon substrate, the chromium and the chromium/gold features are all conductive, there are no charging issues with this calibration standard. Due to its sturdy construction the CDMS standard can be cleaned using a plasma cleaner on low settings.

The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 525um ±10um. There is no coating on the Si surface. Each Pelcotec CDMS ISO calibration standard has a unique identification number.

Global certificate of traceability for CDMS

  Pelcotec CDMS-1-ISO
Substrate: Silicon ?
Substrate size: 2.5 x 2.5mm ?
Substrate thickness: 525 ±10µm ?
Unique serial identification number per chip ?
Calibration squares at 2mm, 1mm, 0.5mm, 0.25mm ?
Graticule lines perpendicular to the X axis ruled at 10um, 5um, 2um and 1um pitch ?
High Resolution version only - Additional graticule lines perpendicular to X axis ruled at 500, 250 and 100nm pitch
Feature material: 50nm Cr (2mm - 5µm) ?
Feature material: 20nm Cr/50nm Au (2µm and 1µm) ?
Feature material: 20nm Cr/50nm Au (500, 250 and 100nm)
Traceable at the wafer level to NIST (ISO 17025:2017 Sampling Scope of Accreditation) T versions
Direct certification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) C versions
Available unmounted ?
SEM mounts A-R available ?
Precision better than 0.3% ?
Code Title Style Mount Pack Size Availability Price Updated: 15-07-2024
STP683-01 Pelcotec CDMS calibration standards, 2mm - 100nm Traceable Unmounted Each 3 weeks Quote only Quote
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STP683-01A Pelcotec CDMS calibration standards, 2mm - 100nm Traceable Mount A Each 3 weeks Quote only Quote
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STP683-01AFM Pelcotec CDMS calibration standards, 2mm - 100nm Traceable 12mm AFM Disc Each 3 weeks Quote only Quote
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STP683-01B Pelcotec CDMS calibration standards, 2mm - 100nm Traceable Mount B Each 3 weeks Quote only Quote
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STP683-01C Pelcotec CDMS calibration standards, 2mm - 100nm Traceable Mount C Each 3 weeks Quote only Quote
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STP683-01D Pelcotec CDMS calibration standards, 2mm - 100nm Traceable Mount D Each 3 weeks Quote only Quote
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STP683-01E Pelcotec CDMS calibration standards, 2mm - 100nm Traceable Mount E Each 3 weeks Quote only Quote
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STP683-01F Pelcotec CDMS calibration standards, 2mm - 100nm Traceable Mount F Each 3 weeks Quote only Quote
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STP683-01K Pelcotec CDMS calibration standards, 2mm - 100nm Traceable Mount K Each 3 weeks Quote only Quote
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STP683-01L Pelcotec CDMS calibration standards, 2mm - 100nm Traceable Mount L Each 3 weeks Quote only Quote
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STP683-01M Pelcotec CDMS calibration standards, 2mm - 100nm Traceable Mount M Each 3 weeks Quote only Quote
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STP683-01O Pelcotec CDMS calibration standards, 2mm - 100nm Traceable Mount O Each 3 weeks Quote only Quote
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STP683-01P Pelcotec CDMS calibration standards, 2mm - 100nm Traceable Mount P Each 3 weeks Quote only Quote
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STP683-01Q Pelcotec CDMS calibration standards, 2mm - 100nm Traceable Mount Q Each 3 weeks Quote only Quote
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STP683-01R Pelcotec CDMS calibration standards, 2mm - 100nm Traceable Mount R Each 3 weeks Quote only Quote
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STP683-01S Pelcotec CDMS calibration standards, 2mm - 100nm Traceable None Each 3 weeks Quote only Quote
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STP687-01 Pelcotec CDMS calibration standards, 2mm - 100nm Certified Unmounted Each 3 weeks Quote only Quote
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STP687-01A Pelcotec CDMS calibration standards, 2mm - 100nm Certified Mount A Each 3 weeks Quote only Quote
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STP687-01AFM Pelcotec CDMS calibration standards, 2mm - 100nm Certified 12mm AFM Disc Each 3 weeks Quote only Quote
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STP687-01B Pelcotec CDMS calibration standards, 2mm - 100nm Certified Mount B Each 3 weeks Quote only Quote
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STP687-01C Pelcotec CDMS calibration standards, 2mm - 100nm Certified Mount C Each 3 weeks Quote only Quote
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STP687-01D Pelcotec CDMS calibration standards, 2mm - 100nm Certified Mount D Each 3 weeks Quote only Quote
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STP687-01E Pelcotec CDMS calibration standards, 2mm - 100nm Certified Mount E Each 3 weeks Quote only Quote
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STP687-01F Pelcotec CDMS calibration standards, 2mm - 100nm Certified Mount F Each 3 weeks Quote only Quote
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STP687-01K Pelcotec CDMS calibration standards, 2mm - 100nm Certified Mount K Each 3 weeks Quote only Quote
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STP687-01L Pelcotec CDMS calibration standards, 2mm - 100nm Certified Mount L Each 3 weeks Quote only Quote
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STP687-01M Pelcotec CDMS calibration standards, 2mm - 100nm Certified Mount M Each 3 weeks Quote only Quote
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STP687-01O Pelcotec CDMS calibration standards, 2mm - 100nm Certified Mount O Each 3 weeks Quote only Quote
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STP687-01P Pelcotec CDMS calibration standards, 2mm - 100nm Certified Mount P Each 3 weeks Quote only Quote
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STP687-01Q Pelcotec CDMS calibration standards, 2mm - 100nm Certified Mount Q Each 3 weeks Quote only Quote
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STP687-01R Pelcotec CDMS calibration standards, 2mm - 100nm Certified Mount R Each 3 weeks Quote only Quote
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STP687-01S Pelcotec CDMS calibration standards, 2mm - 100nm Certified None Each 3 weeks Quote only Quote
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