Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm

The Pelcotec critical dimension magnification standard (CDMS-XY) 2-axis calibration standards provide scale lines in both X and Y axes for ease of 2 axis calibration without stage rotation. They are available as either NIST traceable (using average data measured for each production wafer) or certified against NIST standard (each scale calibrated against a NIST measured standard) with features from 2mm to 1um for magnification 10-20,000x, ideal for desktop SEM.Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50?m, 10?m, 5?m, 2?m, and 1?mThe CDMS standard may also be mounted on a custom mount of your choice.SEM mount selections Type A-RMade on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5um and a combination of 50nm gold over 20nm chromium for the fea...

The Pelcotec critical dimension magnification standard (CDMS-XY) 2-axis calibration standards provide scale lines in both X and Y axes for ease of 2 axis calibration without stage rotation. They are available as either NIST traceable (using average data measured for each production wafer) or certified against NIST standard (each scale calibrated against a NIST measured standard) with features from 2mm to 1um for magnification 10-20,000x, ideal for desktop SEM.

Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50?m, 10?m, 5?m, 2?m, and 1?m

The CDMS standard may also be mounted on a custom mount of your choice.

SEM mount selections Type A-R

Made on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5um and a combination of 50nm gold over 20nm chromium for the features from 2um to 100nm. The Cr and Au/Cr on Si provide excellent contrast both in SE and BSE imaging mode. The features are easier to determine than on etched Si standards. Since the silicon substrate, the chromium and the chromium/gold features are all conductive, there are no charging issues with this calibration standard. Due to its sturdy construction the CDMS standard can be cleaned using a plasma cleaner on low settings.

The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 525um ?10um. There is no coating on the Si surface. Each Pelcotec CDMS ISO calibration standard has a unique identification number.

Global certificate of traceability for CDMS

  Pelcotec CDMS-1-ISO
Substrate: Silicon ?
Substrate size: 2.5 x 2.5mm ?
Substrate thickness: 525 ?10?m ?
Unique serial identification number per chip ?
Calibration squares at 2mm, 1mm, 0.5mm, 0.25mm ?
Graticule lines perpendicular to the X axis ruled at 10um, 5um, 2um and 1um pitch ?
High Resolution version only - Additional graticule lines perpendicular to X axis ruled at 500, 250 and 100nm pitch ?
Feature material: 50nm Cr (2mm - 5?m) ?
Feature material: 20nm Cr/50nm Au (2?m and 1?m) ?
Feature material: 20nm Cr/50nm Au (500, 250 and 100nm) ?
Traceable at the wafer level to NIST (ISO 17025:2017 Sampling Scope of Accreditation) T versions
Direct certification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) C versions
Available unmounted ?
SEM mounts A-R available ?
Precision better than 0.3% ?
Code Title Style Mount Pack Size Availability Price Updated: 13-07-2024
STP684-1 Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Traceable Unmounted Each 3 weeks Quote only Quote
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STP684-1A Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Traceable Mount A Each 3 weeks Quote only Quote
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STP684-1AFM Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Traceable 12mm AFM Disc Each 3 weeks Quote only Quote
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STP684-1B Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Traceable Mount B Each 3 weeks Quote only Quote
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STP684-1C Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Traceable Mount C Each 3 weeks Quote only Quote
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STP684-1D Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Traceable Mount D Each 3 weeks Quote only Quote
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STP684-1E Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Traceable Mount E Each 3 weeks Quote only Quote
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STP684-1F Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Traceable Mount F Each 3 weeks Quote only Quote
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STP684-1K Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Traceable Mount K Each 3 weeks Quote only Quote
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STP684-1L Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Traceable Mount L Each 3 weeks Quote only Quote
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STP684-1M Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Traceable Mount M Each 3 weeks Quote only Quote
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STP684-1O Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Traceable Mount O Each 3 weeks Quote only Quote
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STP684-1P Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Traceable Mount P Each 3 weeks Quote only Quote
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STP684-1Q Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Traceable Mount Q Each 3 weeks Quote only Quote
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STP684-1R Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Traceable Mount R Each 3 weeks Quote only Quote
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STP684-1S Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Traceable None Each 3 weeks Quote only Quote
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STP689-1 Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Certified Unmounted Each 3 weeks Quote only Quote
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STP689-1A Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Certified Mount A Each 3 weeks Quote only Quote
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STP689-1AFM Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Certified 12mm AFM Disc Each 3 weeks Quote only Quote
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STP689-1B Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Certified Mount B Each 3 weeks Quote only Quote
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STP689-1C Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Certified Mount C Each 3 weeks Quote only Quote
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STP689-1D Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Certified Mount D Each 3 weeks Quote only Quote
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STP689-1E Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Certified Mount E Each 3 weeks Quote only Quote
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STP689-1F Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Certified Mount F Each 3 weeks Quote only Quote
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STP689-1K Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Certified Mount K Each 3 weeks Quote only Quote
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STP689-1L Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Certified Mount L Each 3 weeks Quote only Quote
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STP689-1M Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Certified Mount M Each 3 weeks Quote only Quote
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STP689-1O Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Certified Mount O Each 3 weeks Quote only Quote
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STP689-1P Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Certified Mount P Each 3 weeks Quote only Quote
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STP689-1Q Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Certified Mount Q Each 3 weeks Quote only Quote
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STP689-1R Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Certified Mount R Each 3 weeks Quote only Quote
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STP689-1S Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm Certified None Each 3 weeks Quote only Quote
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