Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 1μm

The Pelcotec critical dimension magnification standard (CDMS-XY) 2-axis calibration standards provide scale lines in both X and Y axes for ease of 2 axis calibration without stage rotation. They are available as either NIST traceable (using average data measured for each production wafer) or certified against NIST standard (each scale calibrated against a NIST measured standard) with features from 2mm to 1um for magnification 10-20,000x, ideal for desktop SEM.Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µmThe CDMS standard may also be mounted on a custom mount of your choice.SEM mount selections Type A-R:

The Pelcotec critical dimension magnification standard (CDMS-XY) 2-axis calibration standards provide scale lines in both X and Y axes for ease of 2 axis calibration without stage rotation. They are available as either NIST traceable (using average data measured for each production wafer) or certified against NIST standard (each scale calibrated against a NIST measured standard) with features from 2mm to 1um for magnification 10-20,000x, ideal for desktop SEM.

Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm

The CDMS standard may also be mounted on a custom mount of your choice.

SEM mount selections Type A-R: Technical Data

Made on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5µm and a combination of 50nm gold over 20nm chromium for the features from 2µm to 100nm. The Cr and Au/Cr on Si provide excellent contrast both in SE and BSE imaging mode. The features are easier to determine than on etched Si standards. Since the silicon substrate, the chromium and the chromium/gold features are all conductive, there are no charging issues with this calibration standard. Due to its sturdy construction the CDMS standard can be cleaned using a plasma cleaner on low settings.

The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 525um ±10µm. There is no coating on the Si surface. Each Pelcotec CDMS ISO calibration standard has a unique identification number.

Global certificate of traceability for CDMS

	Pelcotec CDMS-1-ISO
Substrate: Silicon	✓
Substrate size: 2.5 x 2.5mm	✓
Substrate thickness: 525 ±10µm	✓
Unique serial identification number per chip	✓
Calibration squares at 2mm, 1mm, 0.5mm, 0.25mm	✓
Graticule lines perpendicular to the X axis ruled at 10um, 5um, 2um and 1um pitch	✓
High Resolution version only - Additional graticule lines perpendicular to X axis ruled at 500, 250 and 100nm pitch	—
Feature material: 50nm Cr (2mm - 5µm)	✓
Feature material: 20nm Cr/50nm Au (2µm and 1µm)	✓
Feature material: 20nm Cr/50nm Au (500, 250 and 100nm)	—
Traceable at the wafer level to NIST (ISO 17025:2017 Sampling Scope of Accreditation)	T versions
Direct certification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation)	C versions
Available unmounted	✓
SEM mounts A-R available	✓
Precision better than 0.3%	✓