Planotec silicon test specimen, mounted

The Planotec silicon calibration specimen is useful for magnification calibration or image distortion check in SEM and LM.

Single crystal silicon, 5mm x 5mm. The squares repeat every 10µm (0.01mm). The dividing lines are about 1.9µm wide, formed by electron beam lithography. A broader marking line is written every 500µm (0.5mm) which is useful for light microscopy. Lines are etched, and approximately 300nm deep. Available unmounted or mounted on SEM specimen mounts. A certificate of calibration can be supplied for the Silicon Test Specimen at extra cost.

Many types of samples can be mounted directly onto the Silicon Test Specimen so that an internal calibration is obtained in the image.

Thickness: 675µm
Si crystal orientation: <100>
Wafer type: P-type/boron doped
Resistance: 1-30 Ohm/cm

To avoid contamination of test and calibration samples, we recommend storing these under vacuum. For the standard SEM pin mounts, the PEL16179 PELCO SEM sample stub vacuum desiccator would be ideal.

SEM mount selections Type A-R

Code Title Mount Certification Pack Size Availability Price Updated: 14-07-2024
STP615-5 Planotec silicon test specimen, mounted Blackened glass slide No Each 3 weeks $791.00 AUD
STP615-A Planotec silicon test specimen, mounted Type A No Each 3 weeks $209.00 AUD
STP615-B Planotec silicon test specimen, mounted Type B No Each 3 weeks $209.00 AUD
STP615-C Planotec silicon test specimen, mounted Type C No Each 3 weeks $209.00 AUD
STP615-D Planotec silicon test specimen, mounted Type D No Each 3 weeks $209.00 AUD
STP615-E Planotec silicon test specimen, mounted Type E No Each 3 weeks $209.00 AUD
STP615-F Planotec silicon test specimen, mounted Type F No Each 3 weeks $209.00 AUD
STP615-G Planotec silicon test specimen, mounted Type G No Each 3 weeks $376.00 AUD
STP615-K Planotec silicon test specimen, mounted Type K No Each 3 weeks $209.00 AUD
STP615-L Planotec silicon test specimen, mounted Type L No Each 3 weeks $209.00 AUD
STP615-M Planotec silicon test specimen, mounted Type M No Each 3 weeks $209.00 AUD
STP615-O Planotec silicon test specimen, mounted Type O No Each 3 weeks $209.00 AUD
STP615-P Planotec silicon test specimen, mounted Type P No Each 3 weeks $209.00 AUD
STP615-Q Planotec silicon test specimen, mounted Type Q No Each 3 weeks $209.00 AUD
STP615-R Planotec silicon test specimen, mounted Type R No Each 3 weeks $211.00 AUD
STP660-615-5 Planotec silicon test specimen, mounted Blackened glass slide Yes Each 3 weeks $1,526.00 AUD
STP660-615-A Planotec silicon test specimen, mounted Type A Yes Each 3 weeks $1,501.00 AUD
STP660-615-B Planotec silicon test specimen, mounted Type B Yes Each 3 weeks $1,420.00 AUD
STP660-615-C Planotec silicon test specimen, mounted Type C Yes Each 3 weeks $1,420.00 AUD
STP660-615-D Planotec silicon test specimen, mounted Type D Yes Each 3 weeks Quote only Quote
Quote
STP660-615-E Planotec silicon test specimen, mounted Type E Yes Each 3 weeks $1,420.00 AUD
STP660-615-F Planotec silicon test specimen, mounted Type F Yes Each 3 weeks $1,326.00 AUD
STP660-615-G Planotec silicon test specimen, mounted Type G Yes Each 3 weeks $1,591.00 AUD
STP660-615-K Planotec silicon test specimen, mounted Type K Yes Each 3 weeks $1,394.00 AUD
STP660-615-L Planotec silicon test specimen, mounted Type L Yes Each 3 weeks Quote only Quote
Quote
STP660-615-M Planotec silicon test specimen, mounted Type M Yes Each 3 weeks $1,430.00 AUD
STP660-615-O Planotec silicon test specimen, mounted Type O Yes Each 3 weeks $1,430.00 AUD
STP660-615-P Planotec silicon test specimen, mounted Type P Yes Each 3 weeks $1,430.00 AUD
STP660-615-Q Planotec silicon test specimen, mounted Type Q Yes Each 3 weeks $1,372.00 AUD
STP660-615-R Planotec silicon test specimen, mounted Type R Yes Each 3 weeks $1,430.00 AUD