PELCO X-CHECKER SEM calibration x-ray wafer references

The PELCO X-Checker Wafer is available for systems set up for silicon wafer handling. The PELCO X-Checker Wafer is available on standard 200mm (8") and 300mm (12") wafers, with eight standards for elemental and spatial calibrations.

References includes:

• Copper disc to check spectral calibration
• Manganese 88%, nickel 12% alloy to measure full width at half max (FWHM) detector resolution
• Nickel 400 mesh TEM grid for imaging calibration
• PTFE as a fluorine source to measure low energy resolution
• Carbon to monitor calibration at the low end of the spectrum for thin window detectors
• Aluminum foil disc
• Boron nitride to test low energy performance/peak separation
• 304 stainless steel for checking quantification

Instruction booklet and clamshell wafer storage case included.