PELCO X-CHECKER SEM calibration x-ray wafer references

The PELCO X-Checker Wafer is available for systems set up for silicon wafer handling. The PELCO X-Checker Wafer is available on standard 200mm and 300mm wafers, with eight standards for elemental and spatial calibrations.

References includes:

  • Copper disc to check spectral calibration
  • Manganese 88%, nickel 12% alloy to measure full width at half max (FWHM) detector resolution
  • Nickel 400 mesh TEM grid for imaging calibration
  • PTFE as a fluorine source to measure low energy resolution
  • Carbon to monitor calibration at the low end of the spectrum for thin window detectors
  • Aluminium foil disc
  • Boron nitride to test low energy performance/peak separation
  • 304 stainless steel for checking quantification

Instruction booklet and clamshell wafer storage case included.

Updated: 05-10-2025
Code Type Pack Size Availability Price Updated: 05-10-2025
STP602-20 200mm Each 0 in stock (?) P.O.R. Quote
STP602-21 300mm Each 0 in stock (?) P.O.R. Quote