Pelcotec CDMS calibration standards, 2mm - 100nm

The Pelcotec critical dimension magnification standard (CDMS) calibration standards are available as either NIST traceable or certified against NIST standard with features from 2mm to 100nm for magnification 10-200,000x, ideal for SE, FESEM and FIB.

Feature sizes: 2mm, 1mm, 0.5mm, 10um, 5um, 2um, and 1um, 500nm, 250nm, and 100nm

The CDMS standard may also be mounted on a custom mount of your choice.

SEM mount selections Type A-R: Technical Data

Made on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5um and a combination of 50nm gold over 20nm chromium for the features from 2um to 100nm. The Cr and Au/Cr on Si provide excellent contrast both in SE and BSE imaging mode. The features are easier to determine than on etched Si standards. Since the silicon substrate, the chromium and the chromium/gold features are all conductive, there are no charging issues with this calibration standard. Due to its sturdy construction the CDMS standard can be cleaned using a plasma cleaner on low settings.

The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 525um ±10um. There is no coating on the Si surface. Each Pelcotec CDMS ISO calibration standard has a unique identification number.

Global certificate of traceability for CDMS