Pelcotec CDMS-XY 2-axis calibration standards, 2mm - 100nm

The Pelcotec critical dimension magnification standard (CDMS-XY) 2-axis calibration standards provide scale lines in both X and Y axes for ease of 2 axis calibration without stage rotation. They are available as either NIST traceable (using average data measured for each production wafer) or certified against NIST standard (each scale calibrated against a NIST measured standard) with features from 2mm to 100nm for magnification 10-200,000x, ideal for SE, FESEM and FIB.Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50?m 10?m, 5?m, 2?m, and 1?m, 500nm, 250nm, and 100nm.The CDMS standard may also be mounted on a custom mount of your choice.SEM mount selections Type A-R:

The Pelcotec critical dimension magnification standard (CDMS-XY) 2-axis calibration standards provide scale lines in both X and Y axes for ease of 2 axis calibration without stage rotation. They are available as either NIST traceable (using average data measured for each production wafer) or certified against NIST standard (each scale calibrated against a NIST measured standard) with features from 2mm to 100nm for magnification 10-200,000x, ideal for SE, FESEM and FIB.

Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50?m 10?m, 5?m, 2?m, and 1?m, 500nm, 250nm, and 100nm.

The CDMS standard may also be mounted on a custom mount of your choice.

SEM mount selections Type A-R: Technical Data

Made on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5um and a combination of 50nm gold over 20nm chromium for the features from 2?m to 100nm. The Cr and Au/Cr on Si provide excellent contrast both in SE and BSE imaging mode. The features are easier to determine than on etched Si standards. Since the silicon substrate, the chromium and the chromium/gold features are all conductive, there are no charging issues with this calibration standard. Due to its sturdy construction the CDMS standard can be cleaned using a plasma cleaner on low settings.

The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 525?m ?10?m. There is no coating on the Si surface. Each Pelcotec CDMS ISO calibration standard has a unique identification number.

Global certificate of traceability for CDMS

	Pelcotec CDMS-1-ISO
Substrate: Silicon	?
Substrate size: 2.5 x 2.5mm	?
Substrate thickness: 525 ?10?m	?
Unique serial identification number per chip	?
Calibration squares at 2mm, 1mm, 0.5mm, 0.25mm	?
Graticule lines perpendicular to the X axis ruled at 10um, 5um, 2um and 1um pitch	?
High Resolution version only - Additional graticule lines perpendicular to X axis ruled at 500, 250 and 100nm pitch	?
Feature material: 50nm Cr (2mm - 5?m)	?
Feature material: 20nm Cr/50nm Au (2?m and 1?m)	?
Feature material: 20nm Cr/50nm Au (500, 250 and 100nm)	?
Traceable at the wafer level to NIST (ISO 17025:2017 Sampling Scope of Accreditation)	T versions
Direct certification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation)	C versions
Available unmounted	?
SEM mounts A-R available	?
Precision better than 0.3%	?