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Pelcotec ISO CDMS calibration standards, 2mm - 1um, certified to NIST
Pelcotec ISO CDMS calibration standards, 2mm - 1um, certified to NIST:
Pelcotec CDMS ISO Critical Dimensions and Magnification Standards are easy to use and very useful for quick and precise SEM, FE-SEM, FIB, CD-SEM, LM, and AFM magnification calibration in the X axis.
Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab with features from 2mm to 1µm for magnification 10x-20,000x, ideal for desktop SEM
Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, and 1µm
They are available either unmounted or mounted on SEM holders A-R. For AFM applications the Pelcotec CDMS ISO is mounted on a 12mm AFM disc; for LM applications it is mounted on a 25 x 75mm glass slide.
The CDMS standard may also be mounted on a custom mount of your choice.
SEM mount selections Type A-R: Technical Data
Made on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5um and a combination of 50nm gold over 20nm chromium for the features from 2um to 100nm. The Cr and Au/Cr on Si provide excellent contrast both in SE and BSE imaging mode. The features are easier to determine than on etched Si standards. Since the silicon substrate, the chromium and the chromium/gold features are all conductive, there are no charging issues with this calibration standard. Due to its sturdy construction the CDMS standard can be cleaned using a plasma cleaner on low settings.
The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 525µm ±10µm. There is no coating on the Si surface. Each Pelcotec CDMS ISO calibration standard has a unique identification number.
Global certificate of traceability for CDMS
Pelcotec CDMS-1-ISO | |
Substrate: Silicon | ? |
Substrate size: 2.5 x 2.5mm | ? |
Substrate thickness: 525 ±10µm | ? |
Unique serial identification number per chip | ? |
Calibration squares at 2mm, 1mm, 0.5mm, 0.25mm | ? |
Graticule lines perpendicular to the X axis ruled at 10um, 5um, 2um and 1um pitch | ? |
High Resolution version only - Additional graticule lines perpendicular to X axis ruled at 500, 250 and 100nm pitch | — |
Feature material: 50nm Cr (2mm - 5µm) | ? |
Feature material: 20nm Cr/50nm Au (2µm and 1µm) | ? |
Feature material: 20nm Cr/50nm Au (500, 250 and 100nm) | — |
Traceable at the wafer level to NIST (ISO 17025:2017 Sampling Scope of Accreditation) | T versions |
Direct certification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) | C versions |
Available unmounted | ? |
SEM mounts A-R available | ? |
Precision better than 0.3% | ? |
Code | Title | Mount | Pack Size | Availability | Price | Updated: 27-12-2024 |
---|---|---|---|---|---|---|
STP695-1 | Pelcotec ISO CDMS calibration standards, 2mm - 1um, certified to NIST | Unmounted | Each | 3 weeks | P.O.R. | Quote |
STP695-1A | Pelcotec ISO CDMS calibration standards, 2mm - 1um, certified to NIST | Mount A | Each | 3 weeks | P.O.R. | Quote |
STP695-1AFM | Pelcotec ISO CDMS calibration standards, 2mm - 1um, certified to NIST | Mount AFM disc | Each | 3 weeks | P.O.R. | Quote |
STP695-1B | Pelcotec ISO CDMS calibration standards, 2mm - 1um, certified to NIST | Mount B | Each | 3 weeks | P.O.R. | Quote |
STP695-1C | Pelcotec ISO CDMS calibration standards, 2mm - 1um, certified to NIST | Mount C | Each | 3 weeks | P.O.R. | Quote |
STP695-1D | Pelcotec ISO CDMS calibration standards, 2mm - 1um, certified to NIST | Mount D | Each | 3 weeks | P.O.R. | Quote |
STP695-1E | Pelcotec ISO CDMS calibration standards, 2mm - 1um, certified to NIST | Mount E | Each | 3 weeks | P.O.R. | Quote |
STP695-1F | Pelcotec ISO CDMS calibration standards, 2mm - 1um, certified to NIST | Mount F | Each | 3 weeks | P.O.R. | Quote |
STP695-1G | Pelcotec ISO CDMS calibration standards, 2mm - 1um, certified to NIST | Mount G, custom | Each | 3 weeks | P.O.R. | Quote |
STP695-1K | Pelcotec ISO CDMS calibration standards, 2mm - 1um, certified to NIST | Mount K | Each | 3 weeks | P.O.R. | Quote |
STP695-1L | Pelcotec ISO CDMS calibration standards, 2mm - 1um, certified to NIST | Mount L | Each | 3 weeks | P.O.R. | Quote |
STP695-1M | Pelcotec ISO CDMS calibration standards, 2mm - 1um, certified to NIST | Mount M | Each | 3 weeks | P.O.R. | Quote |
STP695-1O | Pelcotec ISO CDMS calibration standards, 2mm - 1um, certified to NIST | Mount O | Each | 3 weeks | P.O.R. | Quote |
STP695-1P | Pelcotec ISO CDMS calibration standards, 2mm - 1um, certified to NIST | Mount P | Each | 3 weeks | P.O.R. | Quote |
STP695-1Q | Pelcotec ISO CDMS calibration standards, 2mm - 1um, certified to NIST | Mount Q | Each | 3 weeks | P.O.R. | Quote |
STP695-1R | Pelcotec ISO CDMS calibration standards, 2mm - 1um, certified to NIST | Mount R | Each | 3 weeks | P.O.R. | Quote |
STP695-1S | Pelcotec ISO CDMS calibration standards, 2mm - 1um, certified to NIST | Mount glass slide | Each | 3 weeks | P.O.R. | Quote |
* Availability Explanation
X weeks – the estimated lead time, based on the average time taken previously to fill orders from this particular supplier. Lead times are from when we receive your order until when we fill your order. For delivery times, please see shipping information below.
In Stock – Plenty of stock on the shelf, ready to ship.
No ETA – our supplier has advised they cannot provide an accurate ETA. Generally there is some issue with supply, and it may be more than 6 months.